本视频从公开的新闻报导，论文，来分析真空双工台的国产化进展，euv里的真空双工台是三大关键技术之一，日本都卡在这里多年，至今未有突破
Synopsis
EUV光刻机包含了三大核心系统：激光光源、物镜系统、真空双工件台。 日本早就突破激光光源、物镜系统多年，却也卡在真空双工 ...
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