光刻机最核心部件！揭秘euv光源系统，为何这么难造？
Synopsis
上期视频讲过了清华大学的SSMB-EUV，意犹未尽。这次直接把EUV光源彻底讲清楚。作为光刻机的核心部件，为什么EUV这么难？
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