从公开的新闻报道分析euv光刻机物镜系统的国产化进展，物镜系统是euv三大关键技术之一 ，也是最昂贵的，占到光刻机整个成本的26%，这是中国最早突破也是最难继续深入的技术。
Synopsis
物镜是光刻机中最昂贵最复杂的部件之一， 光刻机所要求的镜面光洁度非常高，物镜波像差和偏振像差需要严格控制， 极紫外 ...
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